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Vertical hybrid microcavity based on a polymer layer sandwiched between porous silicon photonic crystals

机译:基于夹在多孔硅光子晶体之间的聚合物层的垂直混合微腔

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摘要

A vertical hybrid microcavity is fabricated by sandwiching a polymer layer between distributed Bragg reflectors (DBRs) composed of porous silicon photonic crystals. The DBRs are made by electrochemical etching of Si and consist of alternating porous Si layers of high and low porosity, the top DBR being a freestanding film. The hybrid microcavity demonstrates a deep microcavity\udmode placed within a 200 nm wide photonic band gap, and reveals a many-fold enhancement of the third-order nonlinearity of the microcavity layer. The fabrication technique employed is rather simple, enabling the use of a variety of functional materials as the microcavity spacer.
机译:通过将聚合物层夹在由多孔硅光子晶体组成的分布式布拉格反射器(DBR)之间来制造垂直混合微腔。 DBR通过对Si进行电化学刻蚀制成,并由高孔隙率和低孔隙率的交替多孔Si层组成,顶部DBR是独立膜。混合微腔展示了位于200 nm宽光子带隙内的深微腔\ udmode,并揭示了微腔层三阶非线性的许多倍增强。所采用的制造技术相当简单,能够使用多种功能材料作为微腔间隔件。

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